Invention Grant
- Patent Title: LCD exposure stage device and exposure system
- Patent Title (中): LCD曝光台装置和曝光系统
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Application No.: US13377151Application Date: 2011-09-17
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Publication No.: US08593613B2Publication Date: 2013-11-26
- Inventor: Hsiao-hsien Chen
- Applicant: Hsiao-hsien Chen
- Applicant Address: CN Shenzhen
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Shenzhen
- Priority: CN201120341726 20110913
- International Application: PCT/CN2011/079783 WO 20110917
- International Announcement: WO2013/037139 WO 20130321
- Main IPC: G02F1/13
- IPC: G02F1/13 ; B27B31/04 ; H01L21/68

Abstract:
An LCD exposure stage device is used for placing a substrate thereon, and comprises: a stage having an upper surface contacting with a bottom surface of the substrate; and a plurality of moving pins disposed flat on the upper surface of the stage with pin heads thereof corresponding to side surfaces of the substrate respectively so that the substrate can move horizontally by the moving pins. According to the present disclosure, only the substrate needs to be moved, so the operations are more convenient; and because the stage is always kept at a fixed position, the requirement on its strength can be appropriately lowered. Furthermore, because the substrate contacts with the stage all the time during the moving and exposure processes, and the time necessary for the exposure process is shortened, which make fabrication of the whole LCD panel more efficient.
Public/Granted literature
- US20130063709A1 LCD EXPOSURE STAGE DEVICE AND EXPOSURE SYSTEM Public/Granted day:2013-03-14
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