Invention Grant
- Patent Title: Optical system of a microlithographic projection exposure apparatus and microlithographic exposure method
- Patent Title (中): 微光刻投影曝光装置的光学系统和微光刻曝光方法
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Application No.: US12971798Application Date: 2010-12-17
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Publication No.: US08593618B2Publication Date: 2013-11-26
- Inventor: Michael Totzeck
- Applicant: Michael Totzeck
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G02B5/30 ; G03F7/20

Abstract:
The disclosure relates to an optical system of a microlithographic projection exposure apparatus and to a microlithographic exposure method. An optical system of a microlithographic projection exposure apparatus includes an image rotator, which is arranged in the optical system such that light impinging on the image rotator is at least partially polarized. The image rotator rotates, for light impinging on the image rotator, both the intensity distribution and the polarization distribution of through a given angle of rotation.
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