Invention Grant
US08593623B2 Instrument and method for characterising an optical system 有权
用于表征光学系统的仪器和方法

  • Patent Title: Instrument and method for characterising an optical system
  • Patent Title (中): 用于表征光学系统的仪器和方法
  • Application No.: US12863058
    Application Date: 2009-01-16
  • Publication No.: US08593623B2
    Publication Date: 2013-11-26
  • Inventor: Xavier LevecqGuillaume Dovillaire
  • Applicant: Xavier LevecqGuillaume Dovillaire
  • Applicant Address: FR Orsay
  • Assignee: Imagine Optic
  • Current Assignee: Imagine Optic
  • Current Assignee Address: FR Orsay
  • Agency: Young & Thompson
  • Priority: FR0850336 20080118
  • International Application: PCT/FR2009/050064 WO 20090116
  • International Announcement: WO2009/092975 WO 20090730
  • Main IPC: G01B9/00
  • IPC: G01B9/00
Instrument and method for characterising an optical system
Abstract:
An instrument (1) for characterizing an optical system, includes: at least one primary source (3) for emitting an illumination light beam (FE); an optical device for directing the illumination beam (FE) onto the optical system (L) to be characterized; a wave front analyzer (4) adapted for receiving a beam from the optical system (L); and a unit for processing the measure signals from the wave front analyzer (4), adapted for providing characterization information of the optical system (L). The instrument further includes a scattering member (22) substantially provided in the focal plane of the optical system (L) so as to create a secondary source generating a secondary beam flowing through the optical system (L) and further directed towards the wave front analyzer.
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