Invention Grant
- Patent Title: Thin film structure that may be used with an adhesion layer
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Application No.: US11799360Application Date: 2007-05-01
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Publication No.: US08593784B2Publication Date: 2013-11-26
- Inventor: Eugene P. Marsh
- Applicant: Eugene P. Marsh
- Applicant Address: US NJ Jersey City
- Assignee: Round Rock Research, LLC
- Current Assignee: Round Rock Research, LLC
- Current Assignee Address: US NJ Jersey City
- Agency: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- Main IPC: H01G4/228
- IPC: H01G4/228 ; H01G4/08 ; H01L31/119

Abstract:
A conductive structure, including an adhesion layer and a conductor in contact with the adhesion layer and having a thickness of less than six hundred Angstroms. The present invention may be used to form a capacitor, including an adhesion layer, a first conductor in contact with the adhesion layer and having a thickness of less than six hundred Angstroms, a second conductor, and a dielectric between the first and second conductors. The present invention is also directed towards structures wherein iridium or rhodium may be used in place of the combination of the adhesion layer and conductor.
Public/Granted literature
- US20070263340A1 Thin film structure that may be used with an adhesion layer Public/Granted day:2007-11-15
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