Invention Grant
- Patent Title: In-line inspection yield prediction system
- Patent Title (中): 在线检测产量预测系统
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Application No.: US12873942Application Date: 2010-09-01
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Publication No.: US08594963B2Publication Date: 2013-11-26
- Inventor: Hsiang-Chou Liao , Che-Lun Hung , Tuung Luoh , Ling-Wuu Yang , Ta-Hone Yang , Kuang-Chao Chen
- Applicant: Hsiang-Chou Liao , Che-Lun Hung , Tuung Luoh , Ling-Wuu Yang , Ta-Hone Yang , Kuang-Chao Chen
- Applicant Address: TW Hsin-Chu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Alston & Bird LLP
- Main IPC: G06F19/00
- IPC: G06F19/00
Abstract:
A method of predicting product yield may include determining defect characteristics for a product based at least in part on inspection data associated with critical layers of the product, determining yield loss for each of the critical layers, and estimating product yield based on the determined yield loss of the critical layers. A corresponding apparatus is also provided.
Public/Granted literature
- US20120053855A1 IN-LINE INSPECTION YIELD PREDICTION SYSTEM Public/Granted day:2012-03-01
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