Invention Grant
- Patent Title: Marker layer to facilitate mask build with interactive layers
- Patent Title (中): 标记层,以便于使用交互式图层构建面具
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Application No.: US12909034Application Date: 2010-10-21
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Publication No.: US08595656B2Publication Date: 2013-11-26
- Inventor: Thomas J. Aton , Gregory C. Baldwin , Robert L. Pitts
- Applicant: Thomas J. Aton , Gregory C. Baldwin , Robert L. Pitts
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Alan A. R. Cooper; W. James Brady III; Frederick J. Telecky, Jr.
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A mask build system includes a program for configuring mask layers and a fabrication site for compiling configured mask layers. The system includes at least one database configured by a system processor, the database comprising drawn layers for fabricating reticles of a semiconductor device; and a marker layer configured to define layer dependent features, the marker layer handed off with that part of the at least one database which will support subsequent layers of the database without altering flow of mask build at the fabrication site.
Public/Granted literature
- US20120102441A1 MARKER LAYER TO FACILITATE MASK BUILD WITH INTERACTIVE LAYERS Public/Granted day:2012-04-26
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