Invention Grant
- Patent Title: Controlling atomic force microscope using optical imaging
- Patent Title (中): 使用光学成像控制原子力显微镜
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Application No.: US13249654Application Date: 2011-09-30
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Publication No.: US08595859B1Publication Date: 2013-11-26
- Inventor: Christian Rankl , Asger Iversen , Tianwei Jing
- Applicant: Christian Rankl , Asger Iversen , Tianwei Jing
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
A method for optically controlling an atomic force microscope (AFM) includes acquiring an optical image of a sample using an optical imaging device, identifying a feature of interest on the sample using the optical image, acquiring a high resolution AFM image of the sample using an AFM imaging device, the AFM imaging device comprising a cantilever having a tip, overlaying the AFM image with the optical image at the feature of interest, and positioning the probe tip over the feature of interest using the optical image.
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