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US08595859B1 Controlling atomic force microscope using optical imaging 有权
使用光学成像控制原子力显微镜

Controlling atomic force microscope using optical imaging
Abstract:
A method for optically controlling an atomic force microscope (AFM) includes acquiring an optical image of a sample using an optical imaging device, identifying a feature of interest on the sample using the optical image, acquiring a high resolution AFM image of the sample using an AFM imaging device, the AFM imaging device comprising a cantilever having a tip, overlaying the AFM image with the optical image at the feature of interest, and positioning the probe tip over the feature of interest using the optical image.
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