In a method of manufacturing a through electrode-attached glass substrate, electrode through holes and at least one dummy through hole are formed in a plate-shaped glass, and electrode members are inserted into the electrode through holes but not into the at least one dummy through-hole. The plate-shaped glass and the electrode members are welded by heating the plate-shaped glass at a temperature higher than a softening point of the plate-shaped glass so that the glass is allowed to flow into the at least one dummy through hole. Opposite surfaces of the plate-shaped glass are ground together with the electrode members so as to expose the electrode members to the opposite surfaces of the plate-shaped glass and to configure the electrode members as through electrodes that are electrically separated from each other.