Invention Grant
- Patent Title: Bidirectional wafer carrying pod and wafer transfer system
- Patent Title (中): 双向晶片承载盒和晶片传送系统
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Application No.: US13210533Application Date: 2011-08-16
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Publication No.: US08596200B2Publication Date: 2013-12-03
- Inventor: Jung-Pin Lai , Tsan-I Chen
- Applicant: Jung-Pin Lai , Tsan-I Chen
- Applicant Address: TW Taoyuan County
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Priority: TW100121813A 20110622
- Main IPC: B61B3/00
- IPC: B61B3/00 ; E01B25/26

Abstract:
A wafer transfer system includes a bidirectional wafer carrying pod, an over-head transport (OHT) rail, an OHT, two platforms, and two loading ports respectively connected to the two platforms. The bidirectional wafer carrying pod has a loading housing and two doors respectively and detachably installed on the two opposite sides of the loading housing. The OHT rail has a single rail section and a double rail section. The two ends of the double rail section are connected to the single rail section. The platforms are respectively disposed beside the double rail section. The loading ports are disposed under the double rail section. Through the OHT, The bidirectional wafer carrying pod can selectively be transferred to one rail of the double rail section and disposed on the loading port of the tool corresponding to the one rail of the double rail section.
Public/Granted literature
- US20120325105A1 BIDIRECTIONAL WAFER CARRYING POD AND WAFER TRANSFER SYSTEM Public/Granted day:2012-12-27
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