Invention Grant
US08597376B2 Method of producing porous valve metal thin film and thin film produced thereby 有权
制造多孔阀金属薄膜的方法和由此制备的薄膜

Method of producing porous valve metal thin film and thin film produced thereby
Abstract:
Provided are a porous valve metal thin film having a great surface area, a method for the production thereof, and a thin film capacitor having a great capacity density utilizing the thin film as an anode. The porous valve metal thin film is produced by preparing a thin film in which a valve metal and a hetero-phase component have a particle diameter within a range of from 1 nm to 1 μm and the valve metal and the hetero-phase component are uniformly distributed, subjecting the thin film to a heat treatment so as to adjust the particle diameter and to appropriately sinter the film, and removing the hetero-phase portion.
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