Invention Grant
US08597474B2 Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal 有权
用钛和铝材料的混合物涂覆的基板,制造基板的方法以及钛和铝金属的阴极靶

  • Patent Title: Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal
  • Patent Title (中): 用钛和铝材料的混合物涂覆的基板,制造基板的方法以及钛和铝金属的阴极靶
  • Application No.: US11706454
    Application Date: 2007-02-14
  • Publication No.: US08597474B2
    Publication Date: 2013-12-03
  • Inventor: James J. Finley
  • Applicant: James J. Finley
  • Applicant Address: US OH Cleveland
  • Assignee: PPG Industries Ohio, Inc.
  • Current Assignee: PPG Industries Ohio, Inc.
  • Current Assignee Address: US OH Cleveland
  • Agent Andrew C. Siminerio
  • Main IPC: C23C14/34
  • IPC: C23C14/34
Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal
Abstract:
Titanium and aluminum cathode targets are disclosed for sputtering absorbing coatings of titanium and aluminum-containing materials in atmospheres comprising inert gas, reactive gases such as nitrogen, oxygen, and mixtures thereof, which can further comprise inert gas, such as argon, to form nitrides, oxides, and oxynitrides, as well as metallic films. The titanium and aluminum-containing coatings can be utilized as an outer coat or as one or more coating layers of a coating stack.
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