Invention Grant
- Patent Title: Ceramic material, laminate, member for use in semiconductor manufacturing equipment, and sputtering target member
- Patent Title (中): 陶瓷材料，层压板，用于半导体制造设备的构件和溅射靶构件
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Application No.: US13478508Application Date: 2012-05-23
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Publication No.: US08597776B2Publication Date: 2013-12-03
- Inventor: Morimichi Watanabe , Asumi Jindo , Yuji Katsuda , Yosuke Sato , Yoshinori Isoda
- Applicant: Morimichi Watanabe , Asumi Jindo , Yuji Katsuda , Yosuke Sato , Yoshinori Isoda
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Priority: JP2010-239000 20101025; JP2011-135312 20110617; JPPCT/JP2011/069479 20110829
- Main IPC: C04B35/58
- IPC: C04B35/58 ; B32B7/02 ; C23C14/08 ; B32B18/00
Abstract:
A ceramic material mainly contains magnesium, aluminum, oxygen, and nitrogen, in which the ceramic material has a magnesium-aluminum oxynitride phase serving as a main phase, wherein XRD peaks of the magnesium-aluminum oxynitride phase measured with CuKα radiation appear at at least 2θ=47 to 50°.
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