Invention Grant
US08597975B2 Method of fabricating a microelectronic device with programmable memory 有权
用可编程存储器制造微电子器件的方法

  • Patent Title: Method of fabricating a microelectronic device with programmable memory
  • Patent Title (中): 用可编程存储器制造微电子器件的方法
  • Application No.: US13539751
    Application Date: 2012-07-02
  • Publication No.: US08597975B2
    Publication Date: 2013-12-03
  • Inventor: Faiz Dahmani
  • Applicant: Faiz Dahmani
  • Applicant Address: FR Corbeil Essonnes
  • Assignee: Altis Semiconductor
  • Current Assignee: Altis Semiconductor
  • Current Assignee Address: FR Corbeil Essonnes
  • Agency: Sofer & Haroun, LLP
  • Priority: FR1156033 20110705
  • Main IPC: H01L21/00
  • IPC: H01L21/00
Method of fabricating a microelectronic device with programmable memory
Abstract:
A method is provided for fabricating a microelectronic device with programmable memory that includes: i) depositing an intermediate layer of a material having a chalcogenide on a first electrode; ii) irradiating the intermediate layer of step i with ultraviolet radiation; iii) depositing an ionizable metallic layer on the intermediate layer obtained in step ii; iv) diffusing the metal ions originating from the ionizable metallic layer of step iii into the intermediate layer to form a chalcogenide material containing metal ions; and v) depositing a second electrode on the layer of chalcogenide material containing metal ions obtained in step iv to form the microelectronic device.
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