Invention Grant
US08597975B2 Method of fabricating a microelectronic device with programmable memory
有权
用可编程存储器制造微电子器件的方法
- Patent Title: Method of fabricating a microelectronic device with programmable memory
- Patent Title (中): 用可编程存储器制造微电子器件的方法
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Application No.: US13539751Application Date: 2012-07-02
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Publication No.: US08597975B2Publication Date: 2013-12-03
- Inventor: Faiz Dahmani
- Applicant: Faiz Dahmani
- Applicant Address: FR Corbeil Essonnes
- Assignee: Altis Semiconductor
- Current Assignee: Altis Semiconductor
- Current Assignee Address: FR Corbeil Essonnes
- Agency: Sofer & Haroun, LLP
- Priority: FR1156033 20110705
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method is provided for fabricating a microelectronic device with programmable memory that includes: i) depositing an intermediate layer of a material having a chalcogenide on a first electrode; ii) irradiating the intermediate layer of step i with ultraviolet radiation; iii) depositing an ionizable metallic layer on the intermediate layer obtained in step ii; iv) diffusing the metal ions originating from the ionizable metallic layer of step iii into the intermediate layer to form a chalcogenide material containing metal ions; and v) depositing a second electrode on the layer of chalcogenide material containing metal ions obtained in step iv to form the microelectronic device.
Public/Granted literature
- US20130126813A1 METHOD OF FABRICATING A MICROELECTRONIC DEVICE WITH PROGRAMMABLE MEMORY Public/Granted day:2013-05-23
Information query
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