Invention Grant
US08598007B1 Methods of performing highly tilted halo implantation processes on semiconductor devices
有权
在半导体器件上执行高度倾斜的晕圈注入工艺的方法
- Patent Title: Methods of performing highly tilted halo implantation processes on semiconductor devices
- Patent Title (中): 在半导体器件上执行高度倾斜的晕圈注入工艺的方法
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Application No.: US13487351Application Date: 2012-06-04
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Publication No.: US08598007B1Publication Date: 2013-12-03
- Inventor: Stefan Flachowsky , Jan Hoentschel , Thilo Scheiper
- Applicant: Stefan Flachowsky , Jan Hoentschel , Thilo Scheiper
- Applicant Address: KY Grand Cayman
- Assignee: Globalfoundries Inc.
- Current Assignee: Globalfoundries Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
One illustrative method disclosed herein involves forming first and second gate structures that include a cap layer for a first transistor device and a second transistor device, respectively, wherein the first and second transistors are oriented transverse to one another, performing a first halo ion implant process to form first halo implant regions for the first transistor with the cap layer in position in the first gate structure of the first transistor, removing the cap layer from at least the second gate structure of the second transistor and, after removing the cap layer, performing a second halo ion implant process to form second halo implant regions for the second transistor, wherein the first and second halo implant processes are performed at transverse angles relative to the substrate.
Public/Granted literature
- US20130323892A1 METHODS OF PERFORMING HIGHLY TILTED HALO IMPLANTATION PROCESSES ON SEMICONDUCTOR DEVICES Public/Granted day:2013-12-05
Information query
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