Invention Grant
US08598018B2 Forming an electrode having reduced corrosion and water decomposition on surface using a custom oxide layer
失效
使用定制的氧化物层形成表面上具有降低的腐蚀和水分解的电极
- Patent Title: Forming an electrode having reduced corrosion and water decomposition on surface using a custom oxide layer
- Patent Title (中): 使用定制的氧化物层形成表面上具有降低的腐蚀和水分解的电极
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Application No.: US12820487Application Date: 2010-06-22
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Publication No.: US08598018B2Publication Date: 2013-12-03
- Inventor: Ali Afzali-Azdakani , Shafaat Ahmed , Hariklia Deligianni , Dario L. Goldfarb , Stefan Harrer , Hongbo Peng , Stanislav Polonsky , Stephen Rossnagel , Xiaoyan Shao , Gustavo A. Stolovitzky
- Applicant: Ali Afzali-Azdakani , Shafaat Ahmed , Hariklia Deligianni , Dario L. Goldfarb , Stefan Harrer , Hongbo Peng , Stanislav Polonsky , Stephen Rossnagel , Xiaoyan Shao , Gustavo A. Stolovitzky
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/36 ; H01L21/283
Abstract:
The present invention provides a method of forming an electrode having reduced corrosion and water decomposition on a surface thereof. A conductive layer is deposited on a substrate. The conductive layer is partially oxidized by an oxygen plasma process to convert a portion thereof to an oxide layer thereby forming the electrode. The oxide layer is free of surface defects and the thickness of the oxide layer is from about 0.09 nm to about 10 nm and ranges therebetween, controllable with 0.2 nm precision.
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