Invention Grant
US08598699B2 Semiconductor device having a ground metal layer through which at least one hole is formed, and a ground patch disposed in the at least one hole 失效
具有通过其形成至少一个孔的接地金属层的半导体器件和设置在所述至少一个孔中的接地片

  • Patent Title: Semiconductor device having a ground metal layer through which at least one hole is formed, and a ground patch disposed in the at least one hole
  • Patent Title (中): 具有通过其形成至少一个孔的接地金属层的半导体器件和设置在所述至少一个孔中的接地片
  • Application No.: US13424625
    Application Date: 2012-03-20
  • Publication No.: US08598699B2
    Publication Date: 2013-12-03
  • Inventor: Naoko Ono
  • Applicant: Naoko Ono
  • Applicant Address: JP Tokyo
  • Assignee: Kabushiki Kaisha Toshiba
  • Current Assignee: Kabushiki Kaisha Toshiba
  • Current Assignee Address: JP Tokyo
  • Agency: Holtz, Holtz, Goodman & Chick, PC
  • Main IPC: H01L23/12
  • IPC: H01L23/12 H01L21/4763
Semiconductor device having a ground metal layer through which at least one hole is formed, and a ground patch disposed in the at least one hole
Abstract:
In one embodiment, there is provided a semiconductor device that includes: a substrate; a dielectric layer on the substrate; a first ground metal layer embedded in the dielectric layer and having a first DC potential, the first ground metal layer having a first hole therethrough; a first ground patch disposed in the first hole; a second ground metal layer embedded in the dielectric layer such that the dielectric layer is interposed between the first and second ground metal layers in a thickness direction of the dielectric layer, the second ground metal layer having a second DC potential and having a second hole therethrough; a second ground patch disposed in the second hole; a first via which electrically connects the first ground metal layer and the second ground patch; and a second via which electrically connects the second ground metal layer and the first ground patch.
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