Invention Grant
US08599233B2 Vertical cavity surface emitting laser element, vertical cavity surface emitting laser array, optical scanning device, and image forming apparatus
有权
垂直腔表面发射激光元件,垂直腔表面发射激光器阵列,光学扫描装置和成像装置
- Patent Title: Vertical cavity surface emitting laser element, vertical cavity surface emitting laser array, optical scanning device, and image forming apparatus
- Patent Title (中): 垂直腔表面发射激光元件,垂直腔表面发射激光器阵列,光学扫描装置和成像装置
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Application No.: US13147239Application Date: 2009-12-22
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Publication No.: US08599233B2Publication Date: 2013-12-03
- Inventor: Katsunari Hanaoka
- Applicant: Katsunari Hanaoka
- Applicant Address: JP Tokyo
- Assignee: Ricoh Company, Ltd.
- Current Assignee: Ricoh Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2009-065667 20090318; JP2009-217914 20090918
- International Application: PCT/JP2009/071854 WO 20091222
- International Announcement: WO2010/106720 WO 20100923
- Main IPC: B41J2/45
- IPC: B41J2/45 ; H01S5/00

Abstract:
A disclosed vertical cavity surface emitting laser element includes a substrate, a laminated body sandwiching a semiconductor active layer with an upper reflecting mirror and a lower reflecting mirror, a lower electrode, and an upper electrode. The laser element emits laser light in a direction perpendicular to the surface of the substrate when an electric current is supplied between the upper electrode and the lower electrode. The laser element further includes a selective oxidation layer in the upper reflecting mirror having a current blocking structure made of an oxidized region and an unoxidized region, and a detectable portion formed on a side surface of a mesa structure shaped by the upper reflecting mirror including the selective oxidation layer and the active layer, thereby enabling detecting the position of the selective oxidation layer from a top of the laminated body in a depth direction of the laminated body.
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