Invention Grant
- Patent Title: Linear chromatic confocal microscopic system
- Patent Title (中): 线性彩色共焦显微系统
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Application No.: US13188738Application Date: 2011-07-22
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Publication No.: US08599372B2Publication Date: 2013-12-03
- Inventor: Liang-Chia Chen , Yong-Lin Wu , Yi-Wei Chang
- Applicant: Liang-Chia Chen , Yong-Lin Wu , Yi-Wei Chang
- Applicant Address: TW Taipei
- Assignee: National Taipei University of Technology
- Current Assignee: National Taipei University of Technology
- Current Assignee Address: TW Taipei
- Agency: WPAT, PC
- Agent Justin King
- Priority: TW99124325A 20100723
- Main IPC: G01J3/28
- IPC: G01J3/28

Abstract:
The present invention provides a chromatic confocal microscopic system in which two conjugate fiber modules are spatially configured and employed to conduct a detecting light from a light source and an object light reflected from an object, respectively. By means of the two spatially corresponding fiber modules, the detecting light is projected on the object and the reflected light from the object is entered into the other fiber module. Since each fiber of the fiber module is capable of filtering out the unfocused light and stray lights and allowing the focused light pass therethrough a line slit, thereby minimizing potential interference from light cross talk caused by the overlapped light spots, not only can the present invention obtain the information of surface profile of the object with high vertical measurement resolution, but also achieve high lateral resolution during confocal measurement.
Public/Granted literature
- US20120019821A1 LINEAR CHROMATIC CONFOCAL MICROSCOPIC SYSTEM Public/Granted day:2012-01-26
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