Invention Grant
US08599484B2 Diffractive optical element and measuring device 有权
衍射光学元件和测量装置

Diffractive optical element and measuring device
Abstract:
To provide a diffractive optical element and a measuring device capable of generating light spots of dispersive type. The problem is resolved by providing a diffractive optical element having concaves and convexes and diffracting incident light in two dimensions so as to generate diffracted light, wherein when the number of a part of light spots formed by the diffracted light is denoted by n, an average distance W to the nearest neighbor in the light spots normalized by an area of a region onto which the light spots are projected falls within a range of 1/(2×n1/2)
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