Invention Grant
- Patent Title: Friction force microscope
- Patent Title (中): 摩擦力显微镜
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Application No.: US13409249Application Date: 2012-03-01
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Publication No.: US08601609B2Publication Date: 2013-12-03
- Inventor: Masatoshi Yasutake , Masafumi Watanabe
- Applicant: Masatoshi Yasutake , Masafumi Watanabe
- Applicant Address: JP
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2011-048198 20110304
- Main IPC: G01Q60/24
- IPC: G01Q60/24 ; G01Q60/22

Abstract:
Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism that calculates an effective probe height and a torsional spring constant of the cantilever from bending sensitivity determined from displacement information in a bending direction of the cantilever and torsional sensitivity determined from displacement information in a torsional direction of the cantilever, respectively, so as to use the calculated values for calculating the friction force.
Public/Granted literature
- US20120227139A1 FRICTION FORCE MICROSCOPE Public/Granted day:2012-09-06
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