Invention Grant
- Patent Title: Lithographic projection objective
- Patent Title (中): 光刻投影物镜
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Application No.: US12334685Application Date: 2008-12-15
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Publication No.: US08605253B2Publication Date: 2013-12-10
- Inventor: Olaf Rogalsky , Boris Bittner , Thomas Petasch , Jochen Haeussler
- Applicant: Olaf Rogalsky , Boris Bittner , Thomas Petasch , Jochen Haeussler
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/32

Abstract:
Projection objectives, related systems and components, and methods are disclosed. The methods include providing a projection objective of a lithography projection exposure apparatus, where the projection objective includes a plurality of optical elements between an object plane of the projection objective and an image plane of the projection objective, and the plurality of optical elements includes a first optical element having a refractive power and being disposed in the projection objective at a first location. The methods also include removing the first optical element from the projection objective, and inserting a first spare optical element into the projection objective at the first location, where the removing and inserting steps are performed at a location of use of the lithography projection exposure apparatus in a lithography process.
Public/Granted literature
- US20090153829A1 LITHOGRAPHIC PROJECTION OBJECTIVE Public/Granted day:2009-06-18
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