Invention Grant
- Patent Title: Multi-photon exposure system
- Patent Title (中): 多光子曝光系统
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Application No.: US12919060Application Date: 2009-02-17
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Publication No.: US08605256B2Publication Date: 2013-12-10
- Inventor: Robert J. DeVoe , Brian J. Gates , Dean Faklis , Robert T. Krasa , Przemyslaw P. Markowicz , Craig R. Sykora
- Applicant: Robert J. DeVoe , Brian J. Gates , Dean Faklis , Robert T. Krasa , Przemyslaw P. Markowicz , Craig R. Sykora
- Applicant Address: US MN Saint Paul
- Assignee: 3M Innovative Properties Company
- Current Assignee: 3M Innovative Properties Company
- Current Assignee Address: US MN Saint Paul
- Agent Daniel J. Iden
- International Application: PCT/US2009/034287 WO 20090217
- International Announcement: WO2009/108543 WO 20090903
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/74

Abstract:
An exposure system includes a light source emitting a beam along an optical axis that is capable of inducing a multi-photon reaction in a resin. The exposure system further includes a resin undergoing multiphoton reaction, as well as an automated system including a monitor that measures at least one property of the beam selected from power, pulse length, shape, divergence, or position in a plane normal to the optical axis. The monitor generates at least one signal indicative of the property of the beam, and a sub-system adjusts the beam in response to the signal from the monitor.
Public/Granted literature
- US20110001950A1 MULTI-PHOTON EXPOSURE SYSTEM Public/Granted day:2011-01-06
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