Invention Grant
- Patent Title: Intelligent defect diagnosis method
- Patent Title (中): 智能缺陷诊断方法
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Application No.: US13338331Application Date: 2011-12-28
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Publication No.: US08607169B2Publication Date: 2013-12-10
- Inventor: Iyun Leu
- Applicant: Iyun Leu
- Applicant Address: TW Hsinchu County
- Assignee: Elitetech Technology Co., Ltd.
- Current Assignee: Elitetech Technology Co., Ltd.
- Current Assignee Address: TW Hsinchu County
- Agency: Li & Cai Intellectual Property (USA) Office
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
An intelligent defect diagnosis method for manufacturing fab is provided. The intelligent defect diagnosis method comprises: receiving pluralities of defect data, design layouts and fabrication data; analyzing the defect data, design layouts, and the fabrication data by a defect analysis system, wherein the analyzing step further contains the sub-steps: segmenting and grouping the design layouts into pluralities of multi-pattern group cells to construct LPG cell based pattern groups; introducing the defect data; segmenting defect image into pluralities of defect and pattern contours; mapping the defect data to each multi-pattern group cell to form the LPG based defect composite pattern group; performing coordinate conversion and pattern match between image contour and design layout for coordinate correction; fulfilling CAA with defect contour, pattern contour and design layout, and obtaining corresponding defect yield; classifying the defect type of defect data through defect image classification analysis.
Public/Granted literature
- US20130174102A1 INTELLIGENT DEFECT DIAGNOSIS METHOD Public/Granted day:2013-07-04
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