Invention Grant
- Patent Title: Apparatus for preventing stiction of MEMS microstructure
- Patent Title (中): 用于防止MEMS微结构静止的装置
-
Application No.: US12672993Application Date: 2008-04-14
-
Publication No.: US08613287B2Publication Date: 2013-12-24
- Inventor: Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
- Applicant: Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2007-0082558 20070817
- International Application: PCT/KR2008/002091 WO 20080414
- International Announcement: WO2009/025435 WO 20090226
- Main IPC: B08B3/00
- IPC: B08B3/00
Abstract:
An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.
Public/Granted literature
- US20110186089A1 APPARATUS FOR PREVENTING STICTION OF MEMS MICROSTRUCTURE Public/Granted day:2011-08-04
Information query
