Invention Grant
US08614096B2 Humidity and temperature corrections to improve accuracy of HF ambient air monitors based on tunable diode laser IR absorption measurements 有权
湿度和温度校正,以提高基于可调二极管激光IR吸收测量的HF环境空气监测器的精度

Humidity and temperature corrections to improve accuracy of HF ambient air monitors based on tunable diode laser IR absorption measurements
Abstract:
Method of determining a total HF concentration metric in an environment including measuring an uncorrected HF concentration metric in the environment based on a first infrared absorption measurement at a wavelength corresponding to a vibrational frequency of a non-hydrogen bonded gas phase HF molecule; determining an ambient H2O concentration metric in the environment available for reaction with the non-hydrogen bonded gas phase HF molecules at or about the time of obtaining the first infrared absorption measurement; calculating a HF hydrate concentration metric in the environment based on the uncorrected HF concentration metric, the ambient H2O concentration metric and a reaction equilibrium relationship between the non-hydrogen bonded gas phase HF molecule and the HF hydrate; and determining the total HF concentration metric in the environment based on the uncorrected HF concentration metric and an amount of HF determined by the HF hydrate concentration metric.
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