Invention Grant
US08614137B2 Dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture
有权
浅沟槽隔离(STI)中的双接触沟槽电阻和制造方法
- Patent Title: Dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture
- Patent Title (中): 浅沟槽隔离(STI)中的双接触沟槽电阻和制造方法
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Application No.: US13025501Application Date: 2011-02-11
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Publication No.: US08614137B2Publication Date: 2013-12-24
- Inventor: Timothy W. Kemerer , James S. Nakos , Steven M. Shank
- Applicant: Timothy W. Kemerer , James S. Nakos , Steven M. Shank
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L29/86

Abstract:
The invention relates to a semiconductor structures and methods of manufacture and, more particularly, to a dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture. In a first aspect of the invention, a method comprises forming a trench in a substrate; forming a first insulator layer within the trench; forming a first electrode within the trench, on the first insulator layer, and isolated from the substrate by the first insulator layer; forming a second insulator layer within the trench and on the first electrode; and forming a second electrode within the trench, on the second insulator layer, and isolated from the substrate by the first insulator layer and the second insulator layer.
Public/Granted literature
- US20120205776A1 DUAL CONTACT TRENCH RESISTOR IN SHALLOW TRENCH ISOLATION (STI) AND METHODS OF MANUFACTURE Public/Granted day:2012-08-16
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