Invention Grant
US08614415B2 Defect inspection method of fine structure object and defect inspection apparatus
有权
精细结构物体和缺陷检查装置的缺陷检查方法
- Patent Title: Defect inspection method of fine structure object and defect inspection apparatus
- Patent Title (中): 精细结构物体和缺陷检查装置的缺陷检查方法
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Application No.: US12343829Application Date: 2008-12-24
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Publication No.: US08614415B2Publication Date: 2013-12-24
- Inventor: Hideyuki Moribe , Kenichi Matsumura
- Applicant: Hideyuki Moribe , Kenichi Matsumura
- Applicant Address: JP Tokyo
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: JP Tokyo
- Agent Michael Dryja
- Priority: JP2007-341478 20071228
- Main IPC: G02F1/01
- IPC: G02F1/01

Abstract:
A method for forming an image of an object includes: illuminating sequentially a surface of the object arranged in the same shooting area using each of N (N is natural number equal to or more than two) polarized light beams, each of which has different property; scanning the surface using the each of N polarized light beams; and outputting the each of N polarized light beams reflected by the surface, the each of N polarized light beams passed-through the object or the each of N polarized light beams scattered by the surface, as an image signal.
Public/Granted literature
- US20090166517A1 IMAGE FORMING METHOD AND IMAGE FORMING APPARATUS Public/Granted day:2009-07-02
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