Invention Grant
US08614415B2 Defect inspection method of fine structure object and defect inspection apparatus 有权
精细结构物体和缺陷检查装置的缺陷检查方法

  • Patent Title: Defect inspection method of fine structure object and defect inspection apparatus
  • Patent Title (中): 精细结构物体和缺陷检查装置的缺陷检查方法
  • Application No.: US12343829
    Application Date: 2008-12-24
  • Publication No.: US08614415B2
    Publication Date: 2013-12-24
  • Inventor: Hideyuki MoribeKenichi Matsumura
  • Applicant: Hideyuki MoribeKenichi Matsumura
  • Applicant Address: JP Tokyo
  • Assignee: NEC Corporation
  • Current Assignee: NEC Corporation
  • Current Assignee Address: JP Tokyo
  • Agent Michael Dryja
  • Priority: JP2007-341478 20071228
  • Main IPC: G02F1/01
  • IPC: G02F1/01
Defect inspection method of fine structure object and defect inspection apparatus
Abstract:
A method for forming an image of an object includes: illuminating sequentially a surface of the object arranged in the same shooting area using each of N (N is natural number equal to or more than two) polarized light beams, each of which has different property; scanning the surface using the each of N polarized light beams; and outputting the each of N polarized light beams reflected by the surface, the each of N polarized light beams passed-through the object or the each of N polarized light beams scattered by the surface, as an image signal.
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