Invention Grant
US08614497B2 Method for fabricating a MIM capacitor using gate metal for electrode and related structure
有权
用于电极栅极金属和相关结构的MIM电容器的制造方法
- Patent Title: Method for fabricating a MIM capacitor using gate metal for electrode and related structure
- Patent Title (中): 用于电极栅极金属和相关结构的MIM电容器的制造方法
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Application No.: US12462692Application Date: 2009-08-07
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Publication No.: US08614497B2Publication Date: 2013-12-24
- Inventor: Wei Xia , Xiangdong Chen , Akira Ito
- Applicant: Wei Xia , Xiangdong Chen , Akira Ito
- Applicant Address: US CA Irvine
- Assignee: Broadcom Corporation
- Current Assignee: Broadcom Corporation
- Current Assignee Address: US CA Irvine
- Agency: Farjami & Farjami LLP
- Main IPC: H01L29/92
- IPC: H01L29/92

Abstract:
According to one exemplary embodiment, a method for fabricating a MIM capacitor in a semiconductor die includes forming a dielectric one segment over a substrate and a metal one segment over the dielectric one segment, where the metal one segment forms a lower electrode of the MIM capacitor. The method further includes forming a dielectric two segment over the dielectric one segment and a metal two segment over the dielectric two segment, where a portion of the metal two segment forms an upper electrode of the MIM capacitor. The metal one segment comprises a first gate metal. The metal two segment can comprise a second gate metal.
Public/Granted literature
- US20110031585A1 Method for fabricating a MIM capacitor using gate metal for electrode and related structure Public/Granted day:2011-02-10
Information query
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