Invention Grant
- Patent Title: Pattern generators, calibration systems and methods for patterning workpieces
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Application No.: US13910712Application Date: 2013-06-05
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Publication No.: US08614798B2Publication Date: 2013-12-24
- Inventor: Anders Svensson , Fredrik Jonsson
- Applicant: Micronic Mydata AB
- Applicant Address: SE Taby
- Assignee: Micronic Mydata AB
- Current Assignee: Micronic Mydata AB
- Current Assignee Address: SE Taby
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01B11/14
Abstract:
A pattern generator includes: a writing tool and a calibration system. The writing tool is configured to generate a pattern on a workpiece arranged on a stage. The calibration system is configured to determine a correlation between a coordinate system of the writing tool and a coordinate system of a calibration plate on one of the stage and the workpiece. The calibration system is also configured to determine the correlation at least partly based on an optical correlation signal, or pattern, in a form of at least one optical beam being reflected from at least one reflective pattern on the surface of the calibration plate.
Public/Granted literature
- US20130265589A1 PATTERN GENERATORS, CALIBRATION SYSTEMS AND METHODS FOR PATTERNING WORKPIECES Public/Granted day:2013-10-10
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