Invention Grant
- Patent Title: Manufacturing method for a micromechanical component and micromechanical component
- Patent Title (中): 微机械部件和微机械部件的制造方法
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Application No.: US12898116Application Date: 2010-10-05
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Publication No.: US08621929B2Publication Date: 2014-01-07
- Inventor: Stefan Weiss , Arnim Hoechst
- Applicant: Stefan Weiss , Arnim Hoechst
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009045428 20091007
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
A micromechanical component comprising a displaceable mass made of a substrate material having at least one actuator plate electrode and one first insulating layer between the displaceable mass and the at least one actuator plate electrode, a mounting having a frame, which at least partially encloses the displaceable mass, at least one contact terminal of the at least one actuator plate electrode, and at least one stator plate electrode, and at least one spring component, via which the displaceable mass is connected to the mounting, one of the actuator plate electrodes being connected to the assigned contact terminal in each case via the assigned spring component, wherein the frame of the mounting is made of the substrate material of the displaceable mass and wherein one of the actuator plate electrodes is configured in one piece with the assigned contact terminal and the assigned spring component in each case.
Public/Granted literature
- US20110079081A1 Manufacturing method for a micromechanical component and micromechanical component Public/Granted day:2011-04-07
Information query
IPC分类: