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US08621945B2 Method and apparatus for improving the temperature stability and minimizing the noise of the environment that encloses an interferometric measuring system 有权
用于改善温度稳定性并最小化包围干涉测量系统的环境噪声的方法和装置

  • Patent Title: Method and apparatus for improving the temperature stability and minimizing the noise of the environment that encloses an interferometric measuring system
  • Patent Title (中): 用于改善温度稳定性并最小化包围干涉测量系统的环境噪声的方法和装置
  • Application No.: US13079143
    Application Date: 2011-04-04
  • Publication No.: US08621945B2
    Publication Date: 2014-01-07
  • Inventor: An Andrew Zeng , Shouhong Tang , Steve Cui
  • Applicant: An Andrew Zeng , Shouhong Tang , Steve Cui
  • Applicant Address: US CA Milpitas
  • Assignee: KLA Tencor
  • Current Assignee: KLA Tencor
  • Current Assignee Address: US CA Milpitas
  • Agent Deborah Wenocur
  • Main IPC: G01D11/24
  • IPC: G01D11/24
Method and apparatus for improving the temperature stability and minimizing the noise of the environment that encloses an interferometric measuring system
Abstract:
Disclosed herein is a method and system for providing environmental control for a vibration sensitive system such as an interferometric measurement system, while minimizing acoustic noise during data acquisition.
Abstract(Chinese):

本文公开了一种用于为诸如干涉测量系统的振动敏感系统提供环境控制的方法和系统，同时在数据采集期间最小化声学噪声。

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