Invention Grant
- Patent Title: Apparatus and method for controlling flow rate of liquid, and storage medium
- Patent Title (中): 控制液体流量和储存介质的设备和方法
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Application No.: US13281617Application Date: 2011-10-26
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Publication No.: US08622073B2Publication Date: 2014-01-07
- Inventor: Keigo Satake
- Applicant: Keigo Satake
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2010-247705 20101104
- Main IPC: G05D11/00
- IPC: G05D11/00

Abstract:
The liquid flow rate control apparatus includes a first flow rate control unit which includes a first flow rate control valve for a small flow rate with a first controlled flow rate range, and a second flow rate control unit which includes a second flow rate control valve for a large flow rate with a second controlled flow rate range. In particular, an overlapped range is present between the first and second controlled flow rate ranges and a liquid flows on either any one or both of the first and second flow rate control units depending on variation of a required value of a total rate. The flow rate on any one of the first and second flow rate control units is maintained and the flow rate on the other one increases while increasing the total flow rate of the liquids.
Public/Granted literature
- US20120111412A1 Apparatus and Method for Controlling Flow Rate of Liquid, and Storage Medium Public/Granted day:2012-05-10
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