Invention Grant
US08622528B2 Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and method for manufacturing piezoelectric element 有权
压电元件,液体喷射头,液体喷射装置和压电元件的制造方法

Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and method for manufacturing piezoelectric element
Abstract:
A first lead electrode containing nickel and chromium contacts a second upper electrode containing titanium. Here, since a difference between the normal electrode potential of nickel and chromium and the normal electrode potential of titanium is smaller than a difference between the normal electrode potential of nickel and chromium and the normal electrode potential of iridium, electric corrosion can be made difficult to occur as compared with the case where the first lead electrode containing nickel and chromium contacts a first upper electrode containing iridium. Therefore, a piezoelectric element can be obtained in which an increase in resistance due to the narrowing of the contact area between an upper electrode and a lead electrode for upper electrode or the separation of the lead electrode for upper electrode can be suppressed and which can be driven by a given voltage.
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