Invention Grant
- Patent Title: Vapor deposition apparatus
- Patent Title (中): 蒸镀装置
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Application No.: US12882182Application Date: 2010-09-14
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Publication No.: US08623143B2Publication Date: 2014-01-07
- Inventor: Shao-Kai Pei
- Applicant: Shao-Kai Pei
- Applicant Address: TW New Taipei
- Assignee: Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: TW New Taipei
- Agency: Altis Law Group, Inc.
- Priority: TW99115769A 20100518
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
A vapor deposition apparatus includes a deposition chamber, an umbrella-shaped supporting member, a plurality of coating precursor sources. The umbrella-shaped supporting member is received in the deposition chamber. The supporting member is configured for supporting a number of workpieces. The coating precursor sources oppose the supporting member. Each coating precursor source includes a stationary sleeve and a moveable member moveably received in the stationary sleeve. The moveable member defines a recess for receiving a coating material in a top end of the moveable member opposing the supporting member. The moveable members are moveable relative to the respective stationary sleeve such that a distance between the supporting member and the coating material in each recess can be adjusted.
Public/Granted literature
- US20110283943A1 VAPOR DEPOSITION APPARATUS Public/Granted day:2011-11-24
Information query
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