Invention Grant
US08623167B2 Substrate sealing apparatus and method of sealing substrate using the same 有权
基板密封装置及其使用方法密封基板

Substrate sealing apparatus and method of sealing substrate using the same
Abstract:
A substrate sealing apparatus includes a chamber, at least one lower compressing member, and at least one lower compressing member. The lower compressing member includes a lower compressing surface for emitting heat, is configured to be elevated up and lowered down in a vertical direction with respect to the compressing surface, and rotates about the vertical direction. The upper compressing member includes a lower compressing surface for emitting heat, and is configured to be elevated up and lowered down in the vertical direction.
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