Invention Grant
- Patent Title: Method of electroplating using a high resistance ionic current source
- Patent Title (中): 使用高电阻离子电流源的电镀方法
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Application No.: US13110759Application Date: 2011-05-18
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Publication No.: US08623193B1Publication Date: 2014-01-07
- Inventor: Steven T Mayer , Jonathan D. Reid
- Applicant: Steven T Mayer , Jonathan D. Reid
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D7/12
- IPC: C25D7/12 ; C25D21/12 ; H01L21/768

Abstract:
A substantially uniform layer of a metal is electroplated onto a work piece having a seed layer thereon. This is accomplished by employing a “high resistance ionic current source,” which solves the terminal problem by placing a highly resistive membrane (e.g., a microporous ceramic or fretted glass element) in close proximity to the wafer, thereby swamping the system's resistance. The membrane thereby approximates a constant current source. By keeping the wafer close to the membrane surface, the ionic resistance from the top of the membrane to the surface is much less than the ionic path resistance to the wafer edge, substantially compensating for the sheet resistance in the thin metal film and directing additional current over the center and middle of the wafer.
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