Invention Grant
- Patent Title: Titanium nitride-stripping liquid, and method for stripping titanium nitride coating film
- Patent Title (中): 氮化钛剥离液和氮化钛涂层剥离方法
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Application No.: US12171198Application Date: 2008-07-10
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Publication No.: US08623236B2Publication Date: 2014-01-07
- Inventor: Akira Kumazawa , Takahiro Eto , Takayuki Haraguchi
- Applicant: Akira Kumazawa , Takahiro Eto , Takayuki Haraguchi
- Applicant Address: JP Kanagawa
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kanagawa
- Agency: Procopio Cory Hargreaves & Savitch LLP
- Priority: JP2007-184692 20070713; JP2007-184693 20070713; JP2007-184694 20070713; JP2008-144933 20080602
- Main IPC: C09K13/00
- IPC: C09K13/00 ; C03C25/68

Abstract:
A titanium nitride-stripping liquid for stripping a titanium nitride coating film, the titanium nitride-stripping liquid being capable of stripping a titanium nitride coating film even in a semiconductor multilayer laminate having particularly a layer that includes tungsten or a tungsten alloy, without corrosion of this layer is provided, and furthermore, a titanium nitride-stripping liquid which can strip a titanium nitride coating film without affecting an insulating layer is provided. A titanium nitride-stripping liquid including hydrofluoric acid, hydrogen peroxide and water, and further including an inorganic acid other than hydrofluoric acid. According to the present invention, since the titanium nitride-stripping liquid includes an inorganic acid other than hydrofluoric acid, a titanium nitride coating film can be stripped even in the case in which a semiconductor multilayer laminate has a layer that includes tungsten or a tungsten alloy, without corrosion of the layer by the titanium nitride-stripping liquid.
Public/Granted literature
- US20090017636A1 TITANIUM NITRIDE-STRIPPING LIQUID, AND METHOD FOR STRIPPING TITANIUM NITRIDE COATING FILM Public/Granted day:2009-01-15
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