Invention Grant
US08623452B2 Magnetic random access memory (MRAM) with enhanced magnetic stiffness and method of making same 有权
具有增强的磁刚度的磁性随机存取存储器(MRAM)及其制造方法

  • Patent Title: Magnetic random access memory (MRAM) with enhanced magnetic stiffness and method of making same
  • Patent Title (中): 具有增强的磁刚度的磁性随机存取存储器(MRAM)及其制造方法
  • Application No.: US12965733
    Application Date: 2010-12-10
  • Publication No.: US08623452B2
    Publication Date: 2014-01-07
  • Inventor: Yuchen Zhou
  • Applicant: Yuchen Zhou
  • Applicant Address: US CA Fremont
  • Assignee: Avalanche Technology, Inc.
  • Current Assignee: Avalanche Technology, Inc.
  • Current Assignee Address: US CA Fremont
  • Agency: IPxLAW Group LLP
  • Agent Maryam Imam
  • Main IPC: G11C15/02
  • IPC: G11C15/02
Magnetic random access memory (MRAM) with enhanced magnetic stiffness and method of making same
Abstract:
A spin toque transfer magnetic random access memory (STTMRAM) element and a method of manufacturing the same is disclosed having a free sub-layer structure with enhanced internal stiffness. A first free sub-layer is deposited, the first free sub-layer being made partially of boron (B), annealing is performed of the STTMRAM element at a first temperature after depositing the first free sub-layer to reduce the B content at an interface between the first free sub-layer and the barrier layer, the annealing causing a second free sub-layer to be formed on top of the first free sub-layer and being made partially of B, the amount of B of the second free sub-layer being greater than the amount of B in the first free sub-layer. Cooling down the STTMRAM element to a second temperature that is lower than the first temperature and depositing a third free sub-layer directly on top of the second free layer, with the third free sub-layer being made partially of boron (B), wherein the amount of B in the third sub-free layer is less than the amount of B in the second free sub-layer.
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