Invention Grant
- Patent Title: Multiple vacuum evaporation coating device and method for controlling the same
- Patent Title (中): 多重真空蒸镀装置及其控制方法
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Application No.: US13215434Application Date: 2011-08-23
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Publication No.: US08623455B2Publication Date: 2014-01-07
- Inventor: Sung-Ho Lee , Su-Hwan Kim , Min-Jeong Hwang
- Applicant: Sung-Ho Lee , Su-Hwan Kim , Min-Jeong Hwang
- Applicant Address: KR Giheung-Gu, Yongin, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Giheung-Gu, Yongin, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2005-0019645 20050309
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
A multiple vacuum evaporation coating device and a method for controlling the same. The vacuum evaporation coating device includes a plurality of evaporation sources, a rotating part adapted to rotate the plurality of evaporation sources and a coating block plate adapted to block all but one of said plurality of evaporation sources at any time, each of the plurality of evaporation sources comprise a case, a melting pot arranged within said case, an evaporation material arranged within the melting pot, a heating device arranged outside the melting pot and adapted to heat and evaporate the evaporation material, and a cooling device adapted to block heat generated by the heating device from transferring to an outside.
Public/Granted literature
- US20110305834A1 MULTIPLE VACUUM EVAPORATION COATING DEVICE AND METHOD FOR CONTROLLING THE SAME Public/Granted day:2011-12-15
Information query
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