Invention Grant
US08623469B2 Method of heating dispersion composition and method of forming glass pattern
有权
分散组合物的加热方法和玻璃图案的形成方法
- Patent Title: Method of heating dispersion composition and method of forming glass pattern
- Patent Title (中): 分散组合物的加热方法和玻璃图案的形成方法
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Application No.: US13656059Application Date: 2012-10-19
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Publication No.: US08623469B2Publication Date: 2014-01-07
- Inventor: Akihisa Shimomura , Hidekazu Miyairi
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP
- Agency: Husch Blackwell LLP
- Priority: JP2011-232096 20111021
- Main IPC: B05D3/00
- IPC: B05D3/00 ; B23K26/00

Abstract:
Provided are a method of heating a composition which is applicable to a substrate provided with a material having low heat resistance and a method of forming a glass pattern which leads to reduction of cracks. A composition formed over a substrate is irradiated with a laser beam to bake the paste through local heating. Scan with the laser beam is performed so that there can be no difference in the laser beam irradiation period between the middle portion and the perimeter portion of the composition. Specifically, irradiation with the laser beam is performed so that the width of the beam spot overlapping with the composition in the scanning direction is substantially uniform.
Public/Granted literature
- US20130101754A1 Method of Heating Dispersion Composition and Method of Forming Glass Pattern Public/Granted day:2013-04-25
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