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US08623510B2 Graphite material and method for manufacturing the same 失效
石墨材料及其制造方法

Graphite material and method for manufacturing the same
Abstract:
Provided are a graphite material, which has excellent bonding characteristics to semiconductor and efficiently dissipates heat generated from the semiconductor, and a method for manufacturing such material. The graphite material is provided by adding at least two kinds of elements selected from among silicon, zirconium, calcium, titanium, chromium, manganese, iron, cobalt, nickel, calcium, yttrium, niobium, molybdenum, technetium, ruthenium and compounds containing such elements, and by performing heat treatment. The graphite material is characterized in having a thickness of the 112 face of the graphite crystal of 15 nm or more by X-ray diffraction, and an average heat conductivity of 250 W/(m·K) or more in the three directions of the X, Y and Z axes.
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