Invention Grant
- Patent Title: Time differential reticle inspection
- Patent Title (中): 时差标线检查
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Application No.: US13378811Application Date: 2010-07-16
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Publication No.: US08623576B2Publication Date: 2014-01-07
- Inventor: Eric Brian Catey , Nora-Jean Harned , Yevgeniy Konstantinovich Shmarev , Robert Albert Tharaldsen , Richard David Jacobs
- Applicant: Eric Brian Catey , Nora-Jean Harned , Yevgeniy Konstantinovich Shmarev , Robert Albert Tharaldsen , Richard David Jacobs
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- International Application: PCT/EP2010/060354 WO 20100716
- International Announcement: WO2011/035946 WO 20110331
- Main IPC: G03C5/00
- IPC: G03C5/00 ; G06K9/00
Abstract:
Disclosed are systems and methods for time differential reticle inspection. Contamination is detected by, for example, determining a difference between a first signature of at least a portion of a reticle and a second signature, produced subsequent to the first signature, of the portion of the reticle.
Public/Granted literature
- US20120171600A1 Time Differential Reticle Inspection Public/Granted day:2012-07-05
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