Invention Grant
- Patent Title: Positive-type photoresist composition
- Patent Title (中): 正型光致抗蚀剂组合物
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Application No.: US13884788Application Date: 2011-10-25
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Publication No.: US08623585B2Publication Date: 2014-01-07
- Inventor: Tomoyuki Imada , Takakazu Kage , Norifumi Imaizumi
- Applicant: Tomoyuki Imada , Takakazu Kage , Norifumi Imaizumi
- Applicant Address: JP Tokyo
- Assignee: DIC Corporation
- Current Assignee: DIC Corporation
- Current Assignee Address: JP Tokyo
- Agency: Edwards Wildman Palmer LLP
- Priority: JP2010-251761 20101110
- International Application: PCT/JP2011/074492 WO 20111025
- International Announcement: WO2012/063636 WO 20120518
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/032 ; C08L61/06 ; C08G8/28

Abstract:
Provided is a positive photoresist composition containing, as an essential component, a novolac phenolic resin (C) prepared by condensing an aromatic compound (A) represented by general formula (1) or (2) with an aliphatic aldehyde (B). This positive photoresist composition has high sensitivity and high heat resistance at the same time, and is suitable for use as a positive photoresist in, for example, the manufacture of semiconductor devices such as ICs and LSIs, the manufacture of displays such as LCDs, and the manufacture of printing plates. (In the formulas, R1, R2, and R3 are each independently an alkyl group having 1 to 8 carbon atoms; m, n, and p are each independently an integer of 0 to 4; q is an integer of 1 to (5−p); and s is an integer of 1 to (9−p).)
Public/Granted literature
- US20130244174A1 POSITIVE-TYPE PHOTORESIST COMPOSITION Public/Granted day:2013-09-19
Information query
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