Invention Grant
- Patent Title: Method for fabricating thin-film semiconductor device for display
- Patent Title (中): 制造用于显示的薄膜半导体器件的方法
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Application No.: US13679313Application Date: 2012-11-16
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Publication No.: US08623715B2Publication Date: 2014-01-07
- Inventor: Kenichirou Nishida , Hisao Nagai
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2010/003404 20100520
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L29/66

Abstract:
A method for fabricating a thin-film semiconductor device for display according to the present disclosure includes: preparing a glass substrate; forming, above the glass substrate, an undercoat layer including a nitride film; forming a molybdenum metal layer above the undercoat layer; forming a gate electrode from the metal layer by an etching process; forming a gate insulating film above the gate electrode; forming a non-crystalline silicon layer as a non-crystalline semiconductor layer above the gate insulating film; forming a polycrystalline semiconductor layer which is a polysilicon layer by annealing the non-crystalline silicon layer at a temperature in a range from 700° C. to 1400° C.; forming a source electrode and a drain electrode above the polysilicon layer; and performing hydrogen plasma treatment at a stage after the metal layer is formed and before the polysilicon layer is formed, using a radio frequency power in a range from 0.098 W/cm2 to 0.262 W/cm2.
Public/Granted literature
- US20130071972A1 METHOD FOR FABRICATING THIN-FILM SEMICONDUCTOR DEVICE FOR DISPLAY Public/Granted day:2013-03-21
Information query
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