Invention Grant
US08623717B2 Side-gate defined tunable nanoconstriction in double-gated graphene multilayers
有权
侧栅极限定在双门控石墨烯多层中的可调谐纳米收缩
- Patent Title: Side-gate defined tunable nanoconstriction in double-gated graphene multilayers
- Patent Title (中): 侧栅极限定在双门控石墨烯多层中的可调谐纳米收缩
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Application No.: US13494635Application Date: 2012-06-12
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Publication No.: US08623717B2Publication Date: 2014-01-07
- Inventor: Ching-Tzu Chen , Shu-Jen Han
- Applicant: Ching-Tzu Chen , Shu-Jen Han
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Gibbons Gutman Bongini & Bianco PL
- Agent Jon A. Gibbons
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84

Abstract:
A method to fabricate a novel graphene based, electrically tunable, nanoconstriction device is described. The device includes a back-gate dielectric layer formed over a conductive substrate. The back-gate dielectric layer is, in one example, hexagonal boron nitride, mica, SiOx, SiNx, BNx, HfOx or AlOx. A graphene layer is an AB-stacked bi-layer graphene layer, an ABC-stacked tri-layer graphene layer or a stacked few-layer graphene layer. Contacts are formed over a portion of the graphene layer including at least one source contact, at least one drain contact and at least one set of side-gate contacts. A graphene channel with graphene side gates is formed in the graphene layer between the at least one source contact, the at least one the drain contact and the at least one set of side-gate contacts. A top-gate dielectric layer is formed over the graphene layer. A top-gate electrode is formed on the top-gate dielectric layer.
Public/Granted literature
- US20130330885A1 SIDE-GATE DEFINED TUNABLE NANOCONSTRICTION IN DOUBLE-GATED GRAPHENE MULTILAYERS Public/Granted day:2013-12-12
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