Invention Grant
- Patent Title: Silicon, aluminum oxide, aluminum nitride template for optoelectronic and power devices
- Patent Title (中): 硅，氧化铝，氮化铝模板用于光电和功率器件
-
Application No.: US13717182Application Date: 2012-12-17
-
Publication No.: US08623747B1Publication Date: 2014-01-07
- Inventor: Erdem Arkun , Michael Lebby , Andrew Clark
- Applicant: Erdem Arkun , Michael Lebby , Andrew Clark
- Applicant Address: US CA Palo Alto
- Assignee: Translucent, Inc.
- Current Assignee: Translucent, Inc.
- Current Assignee Address: US CA Palo Alto
- Agency: Parsons & Goltry
- Agent Robert A. Parsons; Michael W. Goltry
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/36
Abstract:
A method of forming a template on a silicon substrate includes providing a single crystal silicon substrate. The method further includes forming an aluminum oxide coating on the surface of the silicon substrate, the aluminum oxide being substantially crystal lattice matched to the surface of the silicon substrate and epitaxially depositing a layer of aluminum nitride (AlN) on the aluminum oxide coating substantially crystal lattice matched to the surface of the aluminum nitride.
Information query
IPC分类:
