Invention Grant
- Patent Title: Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus
- Patent Title (中): 处理对象处理装置，处理对象处理方法，压力控制方法，处理对象传送方法和传送装置
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Application No.: US12542063Application Date: 2009-08-17
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Publication No.: US08623765B2Publication Date: 2014-01-07
- Inventor: Jun Ozawa , Gaku Takahashi
- Applicant: Jun Ozawa , Gaku Takahashi
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2003-179435 20030624; JP2003-422821 20031219
- Main IPC: H01L21/306
- IPC: H01L21/306 ; H01L21/67
Abstract:
A processed object processing apparatus which enables a plurality of processes to be carried out efficiently. A plurality of treatment systems are communicably connected together in a line and in which the objects to be processed are processed. A load lock system is communicably connected to the treatment systems and has a transfer mechanism that transfers the objects to be processed into and out of each of the treatment systems. At least one of the treatment systems is a vacuum treatment system, and the load lock system is disposed in a position such as to form a line with the treatment systems.
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Information query
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