Invention Grant
- Patent Title: Method for polishing aluminum/copper and titanium in damascene structures
- Patent Title (中): 在镶嵌结构中抛光铝/铜和钛的方法
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Application No.: US13846126Application Date: 2013-03-18
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Publication No.: US08623767B2Publication Date: 2014-01-07
- Inventor: Vlasta Brusic , Christopher Thompson , Jeffrey Dysard
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas E. Omholt; Steven D. Weseman
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
The invention provides compositions and methods for planarizing or polishing a substrate. The composition comprises an abrasive consisting of alumina particles optionally treated with a polymer, an α-hydroxycarboxylic acid, an oxidizing agent that oxidizes at least one metal, polyacrylic acid, optionally, a calcium-containing compound, optionally, a biocide, optionally, a pH adjusting agent, and water. The method uses the composition to chemically-mechanically polish a substrate.
Public/Granted literature
- US20130224955A1 METHOD FOR POLISHING ALUMINUM/COPPER AND TITANIUM IN DAMASCENE STRUCTURES Public/Granted day:2013-08-29
Information query
IPC分类: