Invention Grant
US08623767B2 Method for polishing aluminum/copper and titanium in damascene structures 有权
在镶嵌结构中抛光铝/铜和钛的方法

Method for polishing aluminum/copper and titanium in damascene structures
Abstract:
The invention provides compositions and methods for planarizing or polishing a substrate. The composition comprises an abrasive consisting of alumina particles optionally treated with a polymer, an α-hydroxycarboxylic acid, an oxidizing agent that oxidizes at least one metal, polyacrylic acid, optionally, a calcium-containing compound, optionally, a biocide, optionally, a pH adjusting agent, and water. The method uses the composition to chemically-mechanically polish a substrate.
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