Invention Grant
- Patent Title: Etchant for metal layer including copper or a copper alloy, method of manufacturing a display substrate using the same and display substrate
- Patent Title (中): 包括铜或铜合金的金属层的蚀刻剂，使用其的显示基板的制造方法和显示基板
-
Application No.: US13438405Application Date: 2012-04-03
-
Publication No.: US08623773B2Publication Date: 2014-01-07
- Inventor: Hong-Sick Park , Wang-Woo Lee
- Applicant: Hong-Sick Park , Wang-Woo Lee
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR2011-0070228 20110715
- Main IPC: H01L21/302
- IPC: H01L21/302
Abstract:
An etchant includes about 50% by weight to about 70% by weight of phosphoric acid, about 1% by weight to about 5% by weight of nitric acid, about 10% by weight to about 20% by weight of acetic acid, about 0.1% by weight to about 2% by weight of a corrosion inhibition agent including an azole-based compound and a remainder of water.
Public/Granted literature
Information query
IPC分类:
