Invention Grant
US08624189B2 Gas monitoring device, combustion state monitoring device, secular change monitoring device, and impurity concentration monitoring device 有权
气体监测装置,燃烧状态监测装置,长期变化监测装置和杂质浓度监测装置

Gas monitoring device, combustion state monitoring device, secular change monitoring device, and impurity concentration monitoring device
Abstract:
[Object] To provide a gas monitoring device etc. with which gas monitoring can be preformed at high sensitivity by using an InP-based photodiode in which a dark current is reduced without a cooling mechanism and the sensitivity is extended to a wavelength of 1.8 μm or more.[Solution] An absorption layer 3 has a multiquantum well structure composed of group III-V semiconductors, a pn-junction 15 is formed by selectively diffusion of an impurity element in the absorption layer, and the concentration of the impurity element in the absorption layer is 5×1016/cm3 or less. The gas monitoring device detects a gas component and the like contained in a gas by receiving light having at least one wavelength of 3 μm or less.
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