Invention Grant
- Patent Title: Gas monitoring device, combustion state monitoring device, secular change monitoring device, and impurity concentration monitoring device
- Patent Title (中): 气体监测装置,燃烧状态监测装置,长期变化监测装置和杂质浓度监测装置
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Application No.: US13142039Application Date: 2009-07-30
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Publication No.: US08624189B2Publication Date: 2014-01-07
- Inventor: Hiroshi Inada , Youichi Nagai
- Applicant: Hiroshi Inada , Youichi Nagai
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Fish & Richardson P.C.
- Priority: JP2008-331531 20081225
- International Application: PCT/JP2009/063581 WO 20090730
- International Announcement: WO2010/073770 WO 20100701
- Main IPC: H01L31/0248
- IPC: H01L31/0248

Abstract:
[Object] To provide a gas monitoring device etc. with which gas monitoring can be preformed at high sensitivity by using an InP-based photodiode in which a dark current is reduced without a cooling mechanism and the sensitivity is extended to a wavelength of 1.8 μm or more.[Solution] An absorption layer 3 has a multiquantum well structure composed of group III-V semiconductors, a pn-junction 15 is formed by selectively diffusion of an impurity element in the absorption layer, and the concentration of the impurity element in the absorption layer is 5×1016/cm3 or less. The gas monitoring device detects a gas component and the like contained in a gas by receiving light having at least one wavelength of 3 μm or less.
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